Chap. 1 - Role of Process & Device Models in IC Technology 1
Chap. 2 - Numerical Methods for Solving the Partial-Differential Equations which Model Submicron Devices & Processes 29
Chap. 3 - Basic MOS Physics & MOS-Capacitors 83
Chap. 4 - Long-Channel MOSFETs 134
Chap. 5 - The Submicron MOSFET 205
Chap. 6 - Isolation Structures in CMOS 321
Chap. 7 - Thin Gate-Oxides: Growth & Reliability 421
Chap. 8 - Well Formation in CMOS 523
Chap. 9 - Hot-Carrier-Resistant Processing & Device Structures 659
Appendices - 675 Index - 705