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| "In my 25 years of semiconductor process development I have never come across such a complete & in-depth collection of device & process knowledge in one place. Years ago we needed to spend many hours with the Journals to extract the requisite information to supplement our laboratory efforts."
"The material in SILICON PROCESSING FOR THE VLSI ERA synthesizes the basics together with the most modern techniques now employed in advanced technologies. In addition, many subtle processing difficulties are addressed as well, which will be much appreciated by Researchers." "Through the years I have purchased in excess of 100 text-references and none comes as close to these in the total knowledge contained within!" "These volumes are intended for the Researchers and Engineers working in this field, yet they are so very-well written and easy to comprehend that anyone with such an interest in this field can understand them." "Study these Volumes completely!" |
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| "There are many texts that deal with semiconductor processes and device production, any of which would probably serve adequately as a general engineering reference sourc, but SILICON PROCESSING FOR THE VLSI ERA stands out among them. ..."
"If you are looking for a device manufacturing reference source that bridges the often enormous gap between highly specialized texts and general handbooks, you should consider getting SILICON PROCESSING for your bookshelf." |
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| "This book provides an outstanding presentation of Silicon Processing that is technically current, rich in detail, and most importantly, factually correct. The new edition appears to have been completely rewritten, and thoroughly covers every important area."
"I especially enjoyed that each Chapter begins with the basic principles underlying a process, and these explanations are then integrated into the relevant technology (i.e., PVD, CVD, CMP, etc.)." "The two Lithography sections are beautifully done, and contain lucid descriptions of concepts that I have not seen anywhere else." "For anyone seriously interested in semiconductor manufacturing, this book is "Must-Have." No other volume even comes close to being this comprehensive!" "It is indeed the starting point for every new semiconductor engineer, and the reference bible for the seasoned professional." |
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| "This 2nd Edition (© 2000) is a follow-on to the Best-Selling 1st Edition, and has been extensively rewritten, with plenty of new material. ... The entire book is the work of just 2 authors, offering better consistency of material than multi-author books. Logically organized throughout, with very-complete coverage."
"The 2nd Edition is a worthy successor to the Classic 1st Edition. "It is indeed the Book that trained a generation of process engineers!" |
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| "In their new book, SILICON PROCESSING FOR THE VLSI ERA- Vol. 1 (1986), S. Wolf & R.N. Tauber have attempted to provide a comprehensive and up-to-date treatment. To a large extent they succeed."
"Semiconductor processing is a highly multidisciplinary: Few workers enter it with sufficient background to follow all the technical arguments. Thus, a unified introductory-level text is clearly a welcome addition." "In summary, this is arguably the Best-Available text on the subject!" |
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"Yet another text on the processing steps used in IC fabrication seems hard to justify. However, the authors of this volume have succeeded admirably, producing a uniquely valuable reference for the professional microelectronic engineer."
"Mainly, in topical content, the book is fairly predictable, covering the basic fabrication steps. But, there are also chapters on subjects less-commonly found (e.g., vacuum technology, materials characterization, and design of experiments), that are a useful addition to a book of this type." "The key success of this book is the treatment of the subject matter. The entire coverage is based on Professional Seminars given by the authors at the Engineering Extension of the University of California, Berkeley. Thus, the style and depth of analysis is consistent throughout, and technical jargon and 'buzzwords' are explained as they first appear." "Concepts and processes are clearly presented, with both advantages and problems/limitations being highlighted. The use of photographs, not just schematic drawings of fabrication equipment, is noteworthy. Problems for the reader are set at the end of each chapter." "The Authors claim that this is the first book on the subject that uses a new technique to enable rapid publication (i.e., within four months of manuscript preparation), permitting them to include recent information from Technical Journals and Conferences. There is indeed evidence of this." "Vol. 2 is due for publication in 1990. It will be Eagerly Awaited!" |
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"Practicing Microelectronics Engineers will all welcome a reference book where they can readily find information without having to search through the Literature. Wolf & Tauber's book arrived just-in-time to fill such demands."
"While there are several other good introductory texts in this field, SILICON PROCESSING FOR THE VLSI ERA is unique in that it is much more detailed, and contains more references than most." "It is well organized and presented in a logical and clear fashion. The writing style is lucid. The illustrations are abundant, well-placed, and clear. The authors have provided an extensive list of problems at the end of each chapter, and have also prepared a nice Solutions Manual." "This book sets the stage for the planned Vols. 2 & 3. Together, these 3 Volumes almost constitute an Encyclopedia on Processing. I like Vol. 1 really well, and am anxiously awaiting the companion 2nd and 3rd Volumes." "To summarize, this is an excellent book on Silicon Processing. I highly recommend it!" |
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"I have used Volume-1 (1st & 2nd Editions) in my graduate courses on silicon processing since 1986." "Despite the large number of books on silicon fabrication technology, Wolfs text contains the best presentation of fundamentals and basics that are suitable for a graduate course." "Wolf has a unique ability to read the literature and then to compile relevant information in an understandable format for others to digest." |
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