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ION IMPLANTATION - 2000: Science & Technology
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Editor: J.F. Ziegler
© 2000 752 pp. $295.00 |
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CONTENTS
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1. The Physics of Ion Implanation 2. Ion Implantation Applications for Fabricating Silicon Integrated Circuits 3. Damage and Annealing in Ion Implantation 4. Channeling Effects in Ion Implantation 5. The Status of Ion Implanter Equipment in 2000 6. Ion Sources for Implanters used in Semiconductor Manufacturing - Physics and Operation 7. Contamination and Photoresist Problems in Implant Processes 8. Safety Issues in Ion Implantation 9. Measurement & Control of Control of Ion Implantation Processes
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Dr. Wolf's REVIEW
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"This is a unique (and rare) book. It was written to serve as the textbook to accompany the Ion-Implant School taught at the Ion Implant Conference of 2000 (i.e., this Conference is held once every four years). It is a rare book for two reasons: 1. Other than this book (and its predecessors of previous conferences), no other books dealing solely with ion implantation have been written since about 1990! 2. Only a small number of excess copies of this book remained available after the School was over. We managed to get our hands on these few copies, and can make them available (as long as suppplies last) to you. It is unlikely that you will be able to find these books anywhere else but here."
"The main benefit of this text is that it contains information not covered in any other book, especially not in the form that deals with ion implantation issues of the 2000 timeframe. Each of the chapters on a specific ion implantation topic was written by a group of the world's experts on that topic, and it is presented in a tutorial form designed to educate the reader. Order your copy while supplies last!" |
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PRICE: $195.00
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