PROFESSOR'S PICKS
A selection of the best books available on ULSI Silicon Processing
(as recommended by Dr. Stanley Wolf)
CLICK ON A TITLE TO READ THE TABLE OF CONTENTS (AND OUR REVIEW)
Also note that this selection of texts on ULSI technology is not very long. That's because Dr. Wolf limits his recommendations only to those books that meet the following criteria (and there aren't many that do):

1. They must be the most up-to-date books in print;
2. They must contain the best information on the topics covered;
3. They must be well written & well designed;
4. They must be of practical use to professionals in the silicon IC manufacturing community.
Handbook of
Semiconductor
Manufacturing
Technology
$195.00
Handbook of
Semiconductor
Wafer Cleaning Technology
$152.00
Handbook of
Silicon
Semiconductor
Metrology
$195.00
Ion Implantation
2000:
Science &Technology
$295.00
Microlithography:
Science &
Technology
$175.00
Handbook of
Physical Vapor
Deposition (PVD)
$205.00
Handbook of
Semiconductor
Silicon
Technology
$152.00
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