MICROCHIP MANUFACTURING is written for a wider audience than our previous books. The four-volume series SILICON PROCESSING FOR THE VLSI ERA has long been popular among Process Engineers working in the field, and with students training for careers in Microelectronics. However, for readers studying the topic for the first time (or those not needing such in-depth information), these books may have been too daunting.

Thus, we set out to write a book that provides a more introductory and accessible treatment of this vital and fascinating technology. The chief innovation that makes the material easier to grasp is the use of color illustrations throughout. In fact, to our knowledge, it is the first FULL-COLOR technician/engineering-level textbook ever produced on IC-fabrication technology.

The book also conveniently serves semester-long classes on IC fabrication in two academic curricula:

1. Introductory courses in undergraduate, four-year engineering programs of electrical, chemical, and mechanical engineering, materials science, and physics. The mathematical underpinning for such courses is provided in Appendices. At least half the problems at the end of each chapter have been selected with such courses in mind.

2. As a basic book for two-year technician-training programs. Without referring to the Appendices, the remainder of the material contains only the level of mathematics that can be handled by students enrolled in a two-year Semiconductor Manufacturing Technology program.

A 420-PowerPoint set of Foils (on CD, in pdf Format), and a Solutions Manual for the problems, are available to all Adopting Faculty.

The text should also appeal to many Semiconductor-Industry Professionals, especially those peripherally involved with wafer-fabs.

If you Sell Equipment, Materials, & Services to semiconductor manufacturers, it provides an understanding of the overall picture, and how your products fit in.

IC Designers, Product Engineers, Test & Field-Service Engineers, IP-lawyers, Quality-Control & Reliability-Personnel, Sales & Marketing workers will all benefit from its contents.

Many people helped make the publication of this book possible, and we thank and acknowledge their assistance here. First, several faculty members of the Digital Arts Department at Golden West College taught me the graphic-design programs needed to produce this book. Foremost among them was Sean Glumace, who was also an invaluable consultant when production-problems arose.

Various companies (and people within) provided many of the beautiful photographs. They included: Chris Moran, Fred Helmrich, and Patricia Quon at Applied Materials; Shawn Lynch at Lam Research; Bob Klimo and Page Jasienski at Novellus Systems; Maureen Hart and Dan Ferrin at Axcelis Technologies; Chuck Gwynn at Intel Corp; and T.C. Smith (formerly of Motorola). Other individuals read parts of the manuscript and gave insightful feedback, including David Hata and Joseph McGuire.

Special thanks goes to Jerry Healey, who offered significant technical help with computer issues, read several chapters, and afforded access to his technical archives. Helga Janssen sustained the backup-services that kept Lattice Press operating smoothly during the production-phase.

My family also delivered both direct and indirect assistance. My son, Ross, served as a hardware and software troubleshooter many times in a pinch. My daughter Jennifer gave marketing advice and an enthusiastic ear when spirits were low. My wife, Carrol Ann, not only helped prepare many of the graphic illustrations, proof-read many chapters, and typed the Index, but also took on the burden of handling the household administration, as I toiled over the manuscript. Without all of the above contributions, the book could not have been completed.

Stanley Wolf Ph.D.